3.3.1.159. NXspm_piezo_sensor¶
Status:
base class, extends NXsensor
Description:
A position sensor of the piezo scanner. It reports the position of the tip relat …
A position sensor of the piezo scanner. It reports the position of the tip relative to the sample, as given by the extension of the scanner piezos, along the axes of the frame named by
depends_on(the scanner_frame in NXspm). A group may describe all three axes or a single axis (e.g. the height, or Z, piezo sensor).
Symbols:
No symbol table
- Groups cited:
NXspm_piezo_config, NXspm_piezoelectric_material, NXspm_positioner
Structure:
depends_on: (optional) NX_CHAR ⤆
The frame in which
x,y,zand theAXISoffset_valuefields are …The frame in which
x,y,zand theAXISoffset_valuefields are given. Points to an NXcoordinate_system (the scanner_frame in NXspm).x: (optional) NX_NUMBER {units=NX_LENGTH}
The position of the tip relative to the sample along
xof the frame given …The position of the tip relative to the sample along
xof the frame given bydepends_on(e.g. a target or averaged target value).y: (optional) NX_NUMBER {units=NX_LENGTH}
The position of the tip relative to the sample along
yof the frame given …The position of the tip relative to the sample along
yof the frame given bydepends_on(e.g. a target or averaged target value).z: (optional) NX_NUMBER {units=NX_LENGTH}
The position of the tip relative to the sample along
zof the frame given …The position of the tip relative to the sample along
zof the frame given bydepends_on(e.g. a target or averaged target value). In the scanner frame,zpoints from the sample towards the probe, so a vendor value that increases as the tip approaches the sample must be stored with the opposite sign.AXISoffset_value: (optional) NX_NUMBER {units=NX_LENGTH}
The offset that is added to the measured value along the AXIS axis of the fram …
The offset that is added to the measured value along the AXIS axis of the frame given by
depends_on. AXIS denotes thex,yorzaxis (e.g.x_offset_value).piezo_configuration: (optional) NXspm_piezo_config
The piezo configuration information like piezoelectric calibration and materia …
The piezo configuration information like piezoelectric calibration and material properties.
SPM_POSITIONER: (optional) NXspm_positioner
The positioner information like the position of the tip, the position of the …
The positioner information like the position of the tip, the position of the sample, PID controller etc.
piezo_material: (optional) NXspm_piezoelectric_material
The material description and properties of the piezoelectric scanner materials.
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.