3.3.1.158. NXspm_piezo_config

Status:

base class, extends NXobject

Description:

A base class describing piezo actuator settings for scanning probe microscopy. …

A base class describing piezo actuator settings for scanning probe microscopy.

Piezoelectric actuators work utilizing the inverse-piezoelectric effect, when a voltage is applied on the material and it deforms proportional to the applied voltage. Description below shows calibration coefficients and other configuration parameters of open loop piezo actuators (that is actuators without capacitive sensor feedback systems).

Symbols:

No symbol table

Groups cited:

NXcalibration, NXparameters, NXspm_piezoelectric_material

Structure:

depends_on: (optional) NX_CHAR

The frame along whose axes all AXIS quantities of this group are given (e.g. …

The frame along whose axes all AXIS quantities of this group are given (e.g. rangeAXIS, calibratedAXIS, tiltAXIS, driftAXIS). Points to an NXcoordinate_system (the scanner_frame in NXspm).

piezo_material: (optional) NXspm_piezoelectric_material

The material description and properties of the piezoelectric scanner materials.

curvature_radiusAXIS: (optional) NX_NUMBER {units=NX_LENGTH}

AXIS denotes the x or y axis (e.g. curvature_radius_x). It can b …

AXIS denotes the x or y axis (e.g. curvature_radius_x). It can be set approximately to the length of the piezo tube along the corresponding axis.

calibration: (optional) NXcalibration

calibration_type: (optional) NX_CHAR

The name of the calibration type, sometimes it is called …

The name of the calibration type, sometimes it is called active calibration.

Any of these values: active | passive

calibration_name: (optional) NX_CHAR

A specific name of the calibration (e.g. active type with name ‘LHe’).

calibration_date: (optional) NX_DATE_TIME

The date of the calibration.

calibratedAXIS: (optional) NX_NUMBER

The calibration of the piezo along the AXIS axis of the frame given by …

The calibration of the piezo along the AXIS axis of the frame given by depends_on, i.e. the displacement per applied voltage (e.g. Nanonis Calib. X (m/V)). AXIS denotes the x, y or z axis (e.g. calibrated_x). The calibration, the range (rangeAXIS) and the HV gain (hv_gainAXIS) of an axis depend on each other, so that two of them determine the third. The sign of the calibration follows the instrument settings.

hv_gainAXIS: (optional) NX_NUMBER

The gain of the high-voltage amplifier that drives the piezo along the AXIS …

The gain of the high-voltage amplifier that drives the piezo along the AXIS axis (e.g. Nanonis HV Gain X). AXIS denotes the x, y or z axis (e.g. hv_gain_x).

rangeAXIS: (optional) NX_NUMBER {units=NX_LENGTH}

AXIS denotes the x, y or z axis (e.g. range_x). The range is …

AXIS denotes the x, y or z axis (e.g. range_x). The range is the maximum distance the piezo can move along that axis.

calibration_parameters: (optional) NXparameters ⤆

coefficientAXIS: (optional) NX_NUMBER {units=NX_ANY}

The calibration coefficient is the ratio of the actual distance moved by t …

The calibration coefficient is the ratio of the actual distance moved by the piezo due to the voltage or external force applied to the piezo. It is also called first-order correction. AXIS denotes the x or y axis (e.g. coefficient_x).

second_order_correctionAXIS: (optional) NX_NUMBER {units=NX_ANY}

AXIS denotes the x or y axis (e.g. second_order_correction_x). …

AXIS denotes the x or y axis (e.g. second_order_correction_x). If you know them, you can enter the 2nd order piezo characteristics to compensate the error for that axis. The following equation shows the interpretation of the 2nd order correction parameters, For the X-piezo: \(U_x = \frac{1}{c_x} \cdot X + c_{xx} \cdot X^2\) with units: \([V] = \frac{[V]}{[m]} \cdot [m] + \frac{[V]}{[m^2]} \cdot [m^2]\) where cx is the calibration of the piezo X and cxx is the 2nd order correction. The unit for the second-order correction is (\(\frac{V}{m^2}\)).

tiltAXIS: (optional) NX_NUMBER {units=NX_ANGLE}

Tilt correction angle along the AXIS axis of the frame given by …

Tilt correction angle along the AXIS axis of the frame given by depends_on, set in the piezo configuration to compensate the slope of the sample surface (e.g. Nanonis Piezo Configuration>Tilt X (deg)). AXIS denotes the x or y axis (e.g. tilt_x). The sign follows the convention of the instrument.

drift_correction_status: (optional) NX_BOOLEAN

The drift correction status (true / false) in calibration step of piezo.

driftAXIS: (optional) NX_NUMBER {units=NX_ANY}

The drift-compensation speed (a length per time, e.g. m/s) along the AXIS ax …

The drift-compensation speed (a length per time, e.g. m/s) along the AXIS axis of the frame given by depends_on: the piezo is moved at this speed to compensate the thermal drift between tip and sample while drift_correction_status is true (e.g. Nanonis Drift X (m/s)). AXIS denotes the x, y or z axis (e.g. drift_x).

Hypertext Anchors

List of hypertext anchors for all groups, fields, attributes, and links defined in this class.

NXDL Source:

https://github.com/nexusformat/definitions/blob/main/base_classes/NXspm_piezo_config.nxdl.xml