base class, extends NXobject


Container for components of a focused-ion-beam (FIB) system.

FIB capabilities turn especially scanning electron microscopes into specimen preparation labs. FIB is a material preparation technique whereby portions of the sample are illuminated with a focused ion beam with controlled intensity intense enough and with sufficient ion momentum to remove material in a controllable manner.

The fact that an electron microscope with FIB capabilities has needs a second gun with own relevant control circuits, focusing lenses, and other components, warrants an own base class to group these components and distinguish them from the lenses and components for creating and shaping the electron beam.

For more details about the relevant physics and application examples consult the literature, for example:


No symbol table

Groups cited:

NXaperture_em, NXbeam, NXion, NXlens_em, NXmanufacturer, NXsensor, NXsource, NXtransformations


MANUFACTURER: (optional) NXmanufacturer

ion_gun: (optional) NXsource

The source which creates the ion beam.

name: (optional) NX_CHAR

Given name/alias for the ion gun.

emitter_type: (optional) NX_CHAR

Emitter type used to create the ion beam.

If the emitter type is other, give further details in the description field.

Any of these values: liquid_metal | plasma | gas_field | other

description: (optional) NX_CHAR

Ideally, a (globally) unique persistent identifier, link, or text to a resource which gives further details.

brightness: (optional) NX_FLOAT {units=NX_ANY}

Average/nominal brightness

current: (optional) NX_FLOAT {units=NX_CURRENT}

Charge current

voltage: (optional) NX_FLOAT {units=NX_VOLTAGE}

Ion acceleration voltage upon source exit and entering the vacuum flight path.

ion_energy_profile: (optional) NX_NUMBER {units=NX_ENERGY}

probe: (optional) NXion

Which ionized elements or molecular ions form the beam. Examples are gallium, helium, neon, argon, krypton, or xenon, O2+.

TRANSFORMATIONS: (optional) NXtransformations

Affine transformation which detail the arrangement in the microscope relative to the optical axis and beam path.

APERTURE_EM: (optional) NXaperture_em

LENS_EM: (optional) NXlens_em

SENSOR: (optional) NXsensor

BEAM: (optional) NXbeam

Individual characterization results for the position, shape, and characteristics of the ion beam.

NXtransformations should be used to specify the location or position at which details about the ion beam are probed.

Hypertext Anchors

List of hypertext anchors for all groups, fields, attributes, and links defined in this class.

NXDL Source: