3.3.3.87. NXspm_piezo_sensor¶
Status:
base class (contribution), extends NXsensor
Description:
This piezo sensor group refers to the height (or Z) piezo sensor.
Symbols:
No symbol table
- Groups cited:
NXspm_piezo_config, NXspm_piezoelectric_material, NXspm_positioner
Structure:
x: (optional) NX_NUMBER {units=NX_LENGTH}
The x position (e.g., target or averaged target value) of the piezo.
y: (optional) NX_NUMBER {units=NX_LENGTH}
The y position (e.g., target or averaged target value) of the piezo.
z: (optional) NX_NUMBER {units=NX_LENGTH}
The z position (e.g., target or averaged target value) of the piezo.
AXISoffset_value: (optional) NX_NUMBER {units=NX_LENGTH}
The offset value for the piezo axis (X, Y, or Z) that will be added …
The offset value for the piezo axis (X, Y, or Z) that will be added to the measured value.
piezo_configuration: (optional) NXspm_piezo_config
The piezo configuration information like piezoelectric calibration and materia …
The piezo configuration information like piezoelectric calibration and material properties.
SPM_POSITIONER: (optional) NXspm_positioner
The positioner information like the position of the tip, the position of the …
The positioner information like the position of the tip, the position of the sample, PID controller etc.
piezo_material: (optional) NXspm_piezoelectric_material
The material description and properties of the piezoelectric scanner materials.
Hypertext Anchors¶
List of hypertext anchors for all groups, fields, attributes, and links defined in this class.